Integrated Systems Nanofabrication Cleanroom

Fabricating the most demanding nanoscale structures and devices

Integrated Systems Nanofabrication Cleanroom

The Integrated Systems Nanofabrication Cleanroom (ISNC) provides open-access to 9,700 square feet of class 10, 100 and 1000 laboratory space equipped with a full complement of utilities and the latest advances in vibration isolation and electromagnetic shielding to allow installation of advanced processing equipment for fabrication and analysis. The ISNC approach to nanofabrication uniquely integrates classic semiconductor tools and processes with biological, chemical, and medical substrates ranging in size from small pieces to 150mm wafers. By offering dedicated BSL2- capable biosuites, the ISNC provides the opportunity to successfully join standard process techniques with evolving bio-medical and nanoscale fabrication applications. The ISNC also provides a professional staff whose deep knowledge of fabrication techniques and process development enables academic and commercial R&D projects.

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