FEATURED NEWS
New resource for materials analysis online at UCLA NanoLab
Scanning electron microscope enables nanometer-scale imaging and elemental analysis of semiconductors

Investigators characterizing the properties of materials such as semiconductors depend on advanced techniques for viewing samples at high magnification and revealing atomic components. These capabilities have the potential to unlock new advances for engineers, materials scientists and medical researchers conducting process development, failure analysis or elemental analysis.
The UCLA NanoLab provides an advantage for such researchers with the debut of a powerful, easy-to-use scanning electron microscope. The nanofabrication facility has added the ThermoFisher Scientific Verios 5 UC XHR, which images and analyzes conducting and nonconducting materials at the nanometer scale. Access to the microscope is available through the NanoLab, which is open to researchers at UCLA, from other universities or in industry labs.
High-sensitivity detectors and signal filtering give the Verios 5 high materials contrast at low doses for characterizing samples that are susceptible to damage. Elemental analysis is achieved using energy dispersive X-ray spectroscopy, allowing users to quickly determine chemical composition with a high degree of relative precision, even at low concentrations. The instrument can also be used for backscatter electron imaging.
The Verios 5 gathers data quickly thanks to FLASH fine-tuning capabilities and SmartAlign technology eliminating the need for users to align the electron column. Automation features allow for unattended operation. With the ability to calibrate to an NIST-certified standard at high magnification, consistency of measurement is a key feature for the microscope. And the large chamber gives researchers more flexibility for accessories or specimens such as full wafers or metallurgical samples.
For questions, contact Noah Bodzin, senior development engineer, at nbodzin@seas.ucla.edu or 310-983-3312.